What is so energy consuming around fabs? The light source? I always thought of these as high-precision, not-too-high-volume processes and would have expected energy requirements to be lower than e.g. a car factory (or similar to e.g. a mall) and completely negligible on a national grid scale or compared to something like a smelter or lignite mine.

Edit: AI claims HVAC and air filtering/handling can be 40-50% of energy usage. Plus a megawatt per EUV scanner (ok, the latter matches what I would have guessed, but compared to the 16 MW of a single large bucket wheel excavator or estimates I've seen for large shopping malls, that's not that insane either).

TSMC's Arizona fab needs 200MW of electricity.

But even more importantly, they need 2 separate completely independent substation feeds, since a 15 second interruption can cause 0.1B Euro of losses.

Finally, and here is where Europe really really suffers, generally you need these things to be planned, approved and built within a year.

Check out asianometry on YouTube for deep dives into many parts of semiconductor manufacturing, including the lithography processes ASML uses.