Do you have a source of how many total EUV machines Intel bought and TSMC bought in the last 1-2 years?

Yes, Intel made the first purchase for High NA EUV machines. That's largely because they were so far behind TSMC, they took a big risk as the first adopter for High NA EUV with their upcoming 14A node to try to catch up.

TSMC thinks it can keep using low NA EUV machines for N2 and A14 nodes even if they have to increase the number of patterning steps. This also means TSMC will likely keep all the AI chip design wins since High NA has half of the reticle size of low NA. The maximum chip size of High NA is half of low NA. This is a major deal for AI chips because they tend to want to be as big as possible.

None of these things mean Intel bought more total EUV machines than TSMC. A quick internet search says TSMC has about 2x as many fabs in active construction as Intel.

> TSMC thinks it can keep using low NA EUV machines for N2 and A14 nodes even if they have to increase the number of patterning steps.

Intel thought they could skip buying into EUV at all and just increase their patterning steps.

That didn't work out as well as they hoped.