They are already doing 5nm with multi-patterning DUV. But that's not the same as EUV machines. It is not nearly the same scale of production (with yields as low as 20%). They are still a few years away from indigenous EUV. Though I have to admit the shenzhen breakthrough was pretty impressive

▲

rshm 2 hours ago | parent [-]

Is DUV inherently 5nm a 20% yield class or it's matter of process improvement that China is struggling compared to taiwan or Intel ?

	▲	culi 23 minutes ago \| parent [-]
		For multi-patterning DUV, each patterning/etching step accumulates defect risk. Actually now that I'm reading about it, 20% is the better end of the spectrum. I don't think technology could possibly improve it much beyond that. I believe the theoretical maximum yield for multi-patterning DUV at 5nm and 7nm is 30-40% It's not economically sustainable/viable long term. China is only doing it because they've been forced to by the trade war Trump started against them in his first term (Biden didn't really back down either and now Trump 2 tried to ramp it up even higher). China is okay with such low yields because its supposed to be a temporary solution until they achieve domestic EUV tech.