As I understand it, the machine also needs lots of 'normal parts' and can be designed differently to fit the factory and the automation. Like if you need a pipe, instead of buying it from ASML, you can buy it from a local hardware vendor. And parts of the ASML also break, and those parts would be directly shipped from the vendor that makes the part. ASML manages the integration between these parts and each part can have multiple vendors that makes them according to the specs.