The Hacker Fab [1] project at Carnegie Mellon is creating and publishing guides to building simple fab equipment including photolithography and a sputtering system. For somewhat more complex equipment, I appreciate [2] from the founders of InchFab [3].

But maybe the easiest way to do (very low resolution) photolithography at home is to use dry film photoresist, which is like tape you can stick onto a copper PCB you then expose and etch; a cheap roll is ~$20 from eBay/Amazon.

[1] https://docs.hackerfab.org/home [2] https://dspace.mit.edu/handle/1721.1/93835 [3] https://www.inchfab.com/

They also have a discord server that seems pretty healthily active (I'm a long time lurker)