> I don’t know much about lithography which is why I ask - what is an AI supposed to do in a lithography machine? Does anyone know?

Not in the lithography machines probably, but more likely in surrounding equipment and in the business itself.

Some ideas:

* Augment metrology division with a trained model for analysis of the (enormous!) amounts of wafer measurement data

* An extra layer of error detection and possibly correction at all sorts of levels, from wafer alignment on the wafer stage to pre analysis of recipes that are about to be run.

* Something that cleverly digs through the pile of log messages and reports on impending issues that haven't manifested themselves yet in terms of yield loss

* Ideally, deep code analysis to find performance, Cpu or memory issues in the ASML codebase that a human hasn't detected yet because the code base is just too huge. (An engineer usually gets only access to a small part of the codebase, and none - not even read access - to other parts.)

* Dig through the ticketing system (another place where you could easily drown in information overload) to find relationships between tickets, mark potential duplicates and notify of bugs instructing a critical path.

* And of course, replace the first line personnel in the outsourced IT support departments. PC not working? Talk to the LLM first (instead of calling someone), and it'll triage and dispatch

This is all assuming happy flow of course